In 2010 the U.S. Geological Survey (USGS), Pacific Coastal and Marine Science Center completed three cruises to map the bathymetry of the main channel and shallow intertidal mudflats in the southernmost part of south San Francisco Bay. The three surveys were merged to generate comprehensive maps of Coyote Creek (from Calaveras Point east to the railroad bridge) and Alviso Slough (from the bay to the town of Alviso) to establish baseline bathymetry prior to the breaching of levees adjacent to Alviso and Guadalupe Sloughs as part of the South Bay Salt Pond Restoration Project (). Since 2010 the USGS has conducted seven additional surveys to monitor bathymetric change in this region as restoration progresses. The bathymetry surveys were conducted using the state-of-the-art research vessel R/V Parke Snavely outfitted with an interferometric sidescan sonar for swath mapping in extremely shallow water. This publication provides high-resolution bathymetric data collected by the USGS. For the 2010 baseline survey we have merged the bathymetry with aerial lidar data that were collected for the USGS during the same time period to create a seamless, high-resolution digital elevation model (DEM) of the study area. The series of bathymetry datasets are provided at 1 m resolution and the 2010 bathymetric/topographic DEM at 2 m resolution. The data are formatted as both X, Y, Z text files and ESRI Arc ASCII files that are accompanied by Federal Geographic Data Committee (FGDC) compliant metadata.